High quality Atomic Layer Deposition(ALD) thin film coating equipment for:
- Sensor, LED and other III-V devices
- MEMS (microelectromechanical systems)
- Optics and optoelectronics
- Antitarnishing and wear protection
- Energy applications such as solar power, advanced thin film batteries and fuel cells
- Biocompatibe and bioactive surface functionalization of medical devices and implants and many more….